This letter describes the use of nanotransfer printing (nTP) for forming three-dimensional (3D) structures with feature sizes between tens of nanometers and tens of microns over areas of several square millimeters. We demonstrate three different approaches-deep etching through printed hard masks, direct transfer of three-dimensional structures, and purely additive fabrication of multilayer stacks-for using nTP to fabricate a range of complex 3D nanostructures, including closed channels, suspended beams, and nanochannel stacks, that would be difficult or impossible to build with other methods.
|Original language||English (US)|
|Number of pages||5|
|State||Published - Sep 1 2003|
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanical Engineering