Abstract
A three-axis micro- or meso-scale machining apparatus. Embodiments of the apparatus include a spindle having a tool for machining a workpiece, a z-axis movement platform for supporting the spindle and translating the spindle along a z-axis, a mount for supporting the workpiece, and a suspended x-y axes movement platform for supporting the mount and translating the mount along both x- and y-axes.
| Original language | English (US) |
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| U.S. patent number | 7524152 |
| Filing date | 12/3/04 |
| State | Published - Apr 28 2009 |