Three-axis micro- and meso-scale machining apparatus

Andrew E Honegger (Inventor), Richard E DeVor (Inventor), Shiv G Kapoor (Inventor)

Research output: Patent


A three-axis micro- or meso-scale machining apparatus. Embodiments of the apparatus include a spindle having a tool for machining a workpiece, a z-axis movement platform for supporting the spindle and translating the spindle along a z-axis, a mount for supporting the workpiece, and a suspended x-y axes movement platform for supporting the mount and translating the mount along both x- and y-axes.
Original languageEnglish (US)
U.S. patent number7524152
Filing date12/3/04
StatePublished - Apr 28 2009

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