Keyphrases
Thin Film Materials
100%
Displacement Field
100%
Material Parameters
100%
Displacement Measurement
100%
Nanometric Displacement
100%
Load Level
66%
Infinite Plate
66%
Elastic Modulus
33%
Inverse Problem
33%
Adhesion
33%
Material Properties
33%
Atomic Force Microscopy
33%
High-resolution
33%
Atomic Force Microscopy Image
33%
Digital Image Correlation
33%
Load-displacement
33%
Micron-sized
33%
Applied Load
33%
Tensile Test
33%
Hole Diameter
33%
Polysilicon
33%
Small Area
33%
Free-standing Film
33%
Measured Displacement
33%
Perforation
33%
Nonlinear Least Squares
33%
Statistical Measurement
33%
Varying Load
33%
Elliptical Hole
33%
Gripper
33%
Multi-user
33%
Microtensile
33%
MEMS Process
33%
Displacement Solution
33%
Conventional Procedures
33%
Specimen Width
33%
Width Ratio
33%
Material Parameter Estimation
33%
Global Displacement
33%
Engineering
Microelectromechanical System
100%
Thin Films
100%
Film Material
100%
Material Parameter
100%
Displacement Measurement
100%
Displacement Field
75%
Nanometre
50%
Atomic Force Microscopy
50%
Load Level
50%
Infinite Plate
50%
High Resolution
25%
Least Square
25%
Young's Modulus
25%
Digital Image Correlation
25%
Applied Load
25%
Polysilicon
25%
Main Advantage
25%
Tensile Test
25%
Elliptical Hole
25%
Multiuser
25%
Hole Diameter
25%