TY - GEN
T1 - Thin-film lithium niobate based piezoelectric micromachined ultrasound transducers
AU - Lu, Ruochen
AU - Breen, Michael
AU - Hassanien, Ahmed
AU - Yang, Yansong
AU - Gong, Songbin
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020/9/7
Y1 - 2020/9/7
N2 - This work presents the first thin-film lithium niobate (LiNbO3) based piezoelectric micromachined ultrasound transducers (PMUT). Efficient flexural mode excitation is achieved using a proposed lateral field excited (LFE) structure. Thanks to the significant piezoelectricity and low loss in LiNbO3, the implemented device shows an out-of-plane mode at 7.6 MHz, with high electromechanical coupling of 4.2%. The measured Q in vacuum is 2605 indicating the low structural loss, while the measured Q in air is 264 suggesting the ultrasound radiation. Upon further optimizations, LiNbO3-based PMUTs are promising candidates for miniature ultrasound applications.
AB - This work presents the first thin-film lithium niobate (LiNbO3) based piezoelectric micromachined ultrasound transducers (PMUT). Efficient flexural mode excitation is achieved using a proposed lateral field excited (LFE) structure. Thanks to the significant piezoelectricity and low loss in LiNbO3, the implemented device shows an out-of-plane mode at 7.6 MHz, with high electromechanical coupling of 4.2%. The measured Q in vacuum is 2605 indicating the low structural loss, while the measured Q in air is 264 suggesting the ultrasound radiation. Upon further optimizations, LiNbO3-based PMUTs are promising candidates for miniature ultrasound applications.
KW - Lithium niobate
KW - Microelectromechanical systems
KW - Piezoelectric micromachined ultrasound transducers
UR - http://www.scopus.com/inward/record.url?scp=85097867221&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85097867221&partnerID=8YFLogxK
U2 - 10.1109/IUS46767.2020.9251707
DO - 10.1109/IUS46767.2020.9251707
M3 - Conference contribution
AN - SCOPUS:85097867221
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2020 - International Ultrasonics Symposium, Proceedings
PB - IEEE Computer Society
T2 - 2020 IEEE International Ultrasonics Symposium, IUS 2020
Y2 - 7 September 2020 through 11 September 2020
ER -