Thin-film lithium niobate based piezoelectric micromachined ultrasound transducers

Ruochen Lu, Michael Breen, Ahmed Hassanien, Yansong Yang, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work presents the first thin-film lithium niobate (LiNbO3) based piezoelectric micromachined ultrasound transducers (PMUT). Efficient flexural mode excitation is achieved using a proposed lateral field excited (LFE) structure. Thanks to the significant piezoelectricity and low loss in LiNbO3, the implemented device shows an out-of-plane mode at 7.6 MHz, with high electromechanical coupling of 4.2%. The measured Q in vacuum is 2605 indicating the low structural loss, while the measured Q in air is 264 suggesting the ultrasound radiation. Upon further optimizations, LiNbO3-based PMUTs are promising candidates for miniature ultrasound applications.

Original languageEnglish (US)
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
DOIs
StatePublished - Sep 7 2020
Externally publishedYes
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: Sep 7 2020Sep 11 2020

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2020-September
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
Country/TerritoryUnited States
CityLas Vegas
Period9/7/209/11/20

Keywords

  • Lithium niobate
  • Microelectromechanical systems
  • Piezoelectric micromachined ultrasound transducers

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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