Keyphrases
Absorbance
16%
Aluminum Film
16%
Bending Sensitivity
33%
Bi-material Cantilever
16%
Cantilever
100%
Cantilever Bending
50%
Cantilever Deflection
16%
Chemical Analysis
16%
Commercially Available
16%
Fourier Transform Infrared Spectroscopy (FT-IR)
16%
Gold Film
16%
Heat Transfer
16%
Infrared Light
16%
Infrared Measurements
16%
Infrared Radiation Characteristics
33%
Infrared Spectral
16%
Light Source
16%
Mechanical Bending
16%
Microcantilever
100%
Mid-infrared
100%
Monochromator
33%
Optical System
33%
Physics-based Model
16%
Silicon Cantilever
16%
Silicon Nitride
16%
Spectral Characterization
16%
Spectral Range
33%
Spectral Region
100%
Spectral Sensitivity
16%
Temperature Effect
16%
Thermal Detection
16%
Thermomechanical
100%
Vibrational Spectroscopy
16%
Engineering
Aluminum Film
50%
Fitting Parameter
50%
Fourier Transform
50%
Infrared Light
50%
Light Source
50%
Microcantilevers
100%
Nitride
50%
Optical Systems
100%
Spectral Range
100%
Spectral Region
100%
Material Science
Aluminum
50%
Film
100%
Silicon
50%
Silicon Nitride
50%