Thermoelastic damping in nanomechanical resonators with finite wave speeds

Z. F. Khisaeva, M. Ostoja-Starzewski

Research output: Contribution to journalArticlepeer-review

Abstract

The operation of micro-/nanobeams vibrating at very high frequencies, such as encountered in micro-/nanoelectromechanical systems (MEMS/NEMS), hinges on the minimization of intrinsic material losses. We study the associated thermoelastic damping in such beams from the standpoint of a generalized theory of thermoelasticity with one relaxation time. Some of our results relate to: (i) the cooling (instead of heating) in the compressed surface of the beam; (ii) the existence of not one damping peak appearing in the classical theory, but many peaks, with a decreasing amplitude as the frequency tends to infinity; (iii) the relevance of thermoelasticity with finite wave speeds for frequencies on the order of 10 12 Hz.

Original languageEnglish (US)
Pages (from-to)201-216
Number of pages16
JournalJournal of Thermal Stresses
Volume29
Issue number3
DOIs
StatePublished - Mar 2006

Keywords

  • Generalized thermoelasticity
  • Nanoelectromechanical systems
  • Thermoelastic damping

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

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