@article{831b02488c1b4eb78ad70816aafbbfa1,
title = "Thermal strain measurement in sol-gel lead zirconate titanate thin films",
abstract = "A fluorescence-based digital image correlation (DIC) technique is used to characterize the in-plane strain development of blanket sol-gel derived lead zirconate titanate thin films deposited on platinized silicon substrates. The in-plane strain is also measured within film line features patterned via a mediated octadecyltrichlorosilane (ODS) monolayer. The results indicate that the selective film failure induced by the mediated ODS layer succeeds in slightly reducing the in-plane strain transverse to the line feature direction (∼25% lower), while remaining nearly the same as the blanket film case in the direction parallel to the line direction. Additional in-plane stress estimates from wafer curvature measurements for the two film configurations (blanket and ODS patterned) were consistent with the DIC measured strain results.",
author = "Berfield, {T. A.} and Carroll, {J. F.} and Payne, {D. A.} and Sottos, {N. R.}",
note = "Funding Information: The authors would like to acknowledge the Lambros Research Group in the Aerospace Engineering Department at the University of Illinois for providing the DIC code used in this work. In addition, the Braun Research Group in the Materials Science and Engineering Department is acknowledged for assistance in silica nanoparticle fabrication. The authors would also like to acknowledge and thank the National Science Foundation for funding this research through Grant Nos. 88206 and CMMI 07-26742. Some of this work was based on previous studies that were supported by the U.S. Department of Energy, Division of Materials Sciences, under Award No. DEFG02-91ER45439 through the Frederick Seitz Materials Research Laboratory at the University of Illinois at Urbana-Champaign.",
year = "2009",
doi = "10.1063/1.3251420",
language = "English (US)",
volume = "106",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "12",
}