Thermal strain measurement in sol-gel lead zirconate titanate thin films

T. A. Berfield, J. F. Carroll, D. A. Payne, N. R. Sottos

Research output: Contribution to journalArticlepeer-review


A fluorescence-based digital image correlation (DIC) technique is used to characterize the in-plane strain development of blanket sol-gel derived lead zirconate titanate thin films deposited on platinized silicon substrates. The in-plane strain is also measured within film line features patterned via a mediated octadecyltrichlorosilane (ODS) monolayer. The results indicate that the selective film failure induced by the mediated ODS layer succeeds in slightly reducing the in-plane strain transverse to the line feature direction (∼25% lower), while remaining nearly the same as the blanket film case in the direction parallel to the line direction. Additional in-plane stress estimates from wafer curvature measurements for the two film configurations (blanket and ODS patterned) were consistent with the DIC measured strain results.

Original languageEnglish (US)
Article number123501
JournalJournal of Applied Physics
Issue number12
StatePublished - 2009

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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