Thermal strain development in sol-gel derived PZT thin films using DIC

T. A. Berfield, N. R. Sottos

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The piezoelectric performance of electroceramic thin films is highly influenced by the level of residual stresses that develop during the heating stages of film fabrication. To determine critical stages of stress/strain development during thermal treatment, the mechanical response of PZT sol-gel thin films (c.a. 40 nm thickness) is measured via a fluorescence-based digital image correlation method (DIC). For the DIC method, a suspension of silica nanoparticles (c.a. 140 nm diameter) in ethanol is spincast onto the sample surface to provide the random speckle pattern necessary for performing DIC strain measurements. During thermal processing, the in-plane strains are monitored for blanket PZT sol-gel films deposited on Pt/Ti/SiO2/Si substrates. Additionally, results of the strain development within thin film features patterned via a mediated octadecyltrichlorosilane (ODS) monolayer are also presented. Within the patterned features, principal strains were found to vary significantly from the constrained blanket film case at the same temperature.

Original languageEnglish (US)
Title of host publicationSociety for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
Pages342-349
Number of pages8
StatePublished - Dec 1 2009
EventSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 - Albuquerque, NM, United States
Duration: Jun 1 2009Jun 4 2009

Publication series

NameSociety for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
Volume1

Other

OtherSEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
CountryUnited States
CityAlbuquerque, NM
Period6/1/096/4/09

ASJC Scopus subject areas

  • Computational Mechanics

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  • Cite this

    Berfield, T. A., & Sottos, N. R. (2009). Thermal strain development in sol-gel derived PZT thin films using DIC. In Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 (pp. 342-349). (Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009; Vol. 1).