Thermal conductivity of confined ultrathin polymers

M. G. Ghossoub, J. H. Lee, O. T. Baris, David G Cahill, Sanjiv Sinha

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report ultrafast measurements of thermal transport in plasma polymerized CHF3 films deposited on standard Si substrates with Al sputtered on top. We characterize the thin films by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and spectroscopic ellipsometry and measure polymer thicknesses ranging from 33 nm down to 6 nm. Time-domain thermoreflectance (TDTR) provides quantitative data on the polymer thermal response to periodic heating from a pulsed laser source. A pump beam heats the Al layer, which acts as an opto-thermal transducer to the stack (Al-Polymer-Si) and a delayed probe beam measures the change in Al surface reflectance. We extract the polymer thermal conductivity by comparing TDTR data to a thermal diffusion model and find it to increase with decreasing polymer thicknesses below 30 nm.

Original languageEnglish (US)
Title of host publicationNanoscale Heat Transport - From Fundamentals to Devices
Pages72-77
Number of pages6
StatePublished - Dec 1 2009
Event2009 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 13 2009Apr 17 2009

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1172
ISSN (Print)0272-9172

Other

Other2009 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/13/094/17/09

Fingerprint

Thermal conductivity
Polymers
thermal conductivity
polymers
Thermal diffusion
Spectroscopic ellipsometry
Pulsed lasers
Transducers
thermal diffusion
Atomic force microscopy
X ray photoelectron spectroscopy
ellipsometry
Pumps
pulsed lasers
Plasmas
transducers
Heating
Thin films
Hot Temperature
photoelectron spectroscopy

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Ghossoub, M. G., Lee, J. H., Baris, O. T., Cahill, D. G., & Sinha, S. (2009). Thermal conductivity of confined ultrathin polymers. In Nanoscale Heat Transport - From Fundamentals to Devices (pp. 72-77). (Materials Research Society Symposium Proceedings; Vol. 1172).

Thermal conductivity of confined ultrathin polymers. / Ghossoub, M. G.; Lee, J. H.; Baris, O. T.; Cahill, David G; Sinha, Sanjiv.

Nanoscale Heat Transport - From Fundamentals to Devices. 2009. p. 72-77 (Materials Research Society Symposium Proceedings; Vol. 1172).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ghossoub, MG, Lee, JH, Baris, OT, Cahill, DG & Sinha, S 2009, Thermal conductivity of confined ultrathin polymers. in Nanoscale Heat Transport - From Fundamentals to Devices. Materials Research Society Symposium Proceedings, vol. 1172, pp. 72-77, 2009 MRS Spring Meeting, San Francisco, CA, United States, 4/13/09.
Ghossoub MG, Lee JH, Baris OT, Cahill DG, Sinha S. Thermal conductivity of confined ultrathin polymers. In Nanoscale Heat Transport - From Fundamentals to Devices. 2009. p. 72-77. (Materials Research Society Symposium Proceedings).
Ghossoub, M. G. ; Lee, J. H. ; Baris, O. T. ; Cahill, David G ; Sinha, Sanjiv. / Thermal conductivity of confined ultrathin polymers. Nanoscale Heat Transport - From Fundamentals to Devices. 2009. pp. 72-77 (Materials Research Society Symposium Proceedings).
@inproceedings{0db029b63b27492b9a443049f7214332,
title = "Thermal conductivity of confined ultrathin polymers",
abstract = "We report ultrafast measurements of thermal transport in plasma polymerized CHF3 films deposited on standard Si substrates with Al sputtered on top. We characterize the thin films by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and spectroscopic ellipsometry and measure polymer thicknesses ranging from 33 nm down to 6 nm. Time-domain thermoreflectance (TDTR) provides quantitative data on the polymer thermal response to periodic heating from a pulsed laser source. A pump beam heats the Al layer, which acts as an opto-thermal transducer to the stack (Al-Polymer-Si) and a delayed probe beam measures the change in Al surface reflectance. We extract the polymer thermal conductivity by comparing TDTR data to a thermal diffusion model and find it to increase with decreasing polymer thicknesses below 30 nm.",
author = "Ghossoub, {M. G.} and Lee, {J. H.} and Baris, {O. T.} and Cahill, {David G} and Sanjiv Sinha",
year = "2009",
month = "12",
day = "1",
language = "English (US)",
isbn = "9781615677832",
series = "Materials Research Society Symposium Proceedings",
pages = "72--77",
booktitle = "Nanoscale Heat Transport - From Fundamentals to Devices",

}

TY - GEN

T1 - Thermal conductivity of confined ultrathin polymers

AU - Ghossoub, M. G.

AU - Lee, J. H.

AU - Baris, O. T.

AU - Cahill, David G

AU - Sinha, Sanjiv

PY - 2009/12/1

Y1 - 2009/12/1

N2 - We report ultrafast measurements of thermal transport in plasma polymerized CHF3 films deposited on standard Si substrates with Al sputtered on top. We characterize the thin films by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and spectroscopic ellipsometry and measure polymer thicknesses ranging from 33 nm down to 6 nm. Time-domain thermoreflectance (TDTR) provides quantitative data on the polymer thermal response to periodic heating from a pulsed laser source. A pump beam heats the Al layer, which acts as an opto-thermal transducer to the stack (Al-Polymer-Si) and a delayed probe beam measures the change in Al surface reflectance. We extract the polymer thermal conductivity by comparing TDTR data to a thermal diffusion model and find it to increase with decreasing polymer thicknesses below 30 nm.

AB - We report ultrafast measurements of thermal transport in plasma polymerized CHF3 films deposited on standard Si substrates with Al sputtered on top. We characterize the thin films by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and spectroscopic ellipsometry and measure polymer thicknesses ranging from 33 nm down to 6 nm. Time-domain thermoreflectance (TDTR) provides quantitative data on the polymer thermal response to periodic heating from a pulsed laser source. A pump beam heats the Al layer, which acts as an opto-thermal transducer to the stack (Al-Polymer-Si) and a delayed probe beam measures the change in Al surface reflectance. We extract the polymer thermal conductivity by comparing TDTR data to a thermal diffusion model and find it to increase with decreasing polymer thicknesses below 30 nm.

UR - http://www.scopus.com/inward/record.url?scp=77950835662&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77950835662&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:77950835662

SN - 9781615677832

T3 - Materials Research Society Symposium Proceedings

SP - 72

EP - 77

BT - Nanoscale Heat Transport - From Fundamentals to Devices

ER -