Thermal conductivity of confined ultrathin polymers

M. G. Ghossoub, J. H. Lee, O. T. Baris, D. G. Cahill, S. Sinha

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report ultrafast measurements of thermal transport in plasma polymerized CHF3 films deposited on standard Si substrates with Al sputtered on top. We characterize the thin films by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and spectroscopic ellipsometry and measure polymer thicknesses ranging from 33 nm down to 6 nm. Time-domain thermoreflectance (TDTR) provides quantitative data on the polymer thermal response to periodic heating from a pulsed laser source. A pump beam heats the Al layer, which acts as an opto-thermal transducer to the stack (Al-Polymer-Si) and a delayed probe beam measures the change in Al surface reflectance. We extract the polymer thermal conductivity by comparing TDTR data to a thermal diffusion model and find it to increase with decreasing polymer thicknesses below 30 nm.

Original languageEnglish (US)
Title of host publicationNanoscale Heat Transport - From Fundamentals to Devices
PublisherMaterials Research Society
Pages72-77
Number of pages6
ISBN (Print)9781615677832
DOIs
StatePublished - Jan 1 2009
Event2009 MRS Spring Meeting - San Francisco, CA, United States
Duration: Apr 13 2009Apr 17 2009

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1172
ISSN (Print)0272-9172

Other

Other2009 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/13/094/17/09

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Ghossoub, M. G., Lee, J. H., Baris, O. T., Cahill, D. G., & Sinha, S. (2009). Thermal conductivity of confined ultrathin polymers. In Nanoscale Heat Transport - From Fundamentals to Devices (pp. 72-77). (Materials Research Society Symposium Proceedings; Vol. 1172). Materials Research Society. https://doi.org/10.1557/proc-1172-t02-03