@inproceedings{0db029b63b27492b9a443049f7214332,
title = "Thermal conductivity of confined ultrathin polymers",
abstract = "We report ultrafast measurements of thermal transport in plasma polymerized CHF3 films deposited on standard Si substrates with Al sputtered on top. We characterize the thin films by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and spectroscopic ellipsometry and measure polymer thicknesses ranging from 33 nm down to 6 nm. Time-domain thermoreflectance (TDTR) provides quantitative data on the polymer thermal response to periodic heating from a pulsed laser source. A pump beam heats the Al layer, which acts as an opto-thermal transducer to the stack (Al-Polymer-Si) and a delayed probe beam measures the change in Al surface reflectance. We extract the polymer thermal conductivity by comparing TDTR data to a thermal diffusion model and find it to increase with decreasing polymer thicknesses below 30 nm.",
author = "Ghossoub, {M. G.} and Lee, {J. H.} and Baris, {O. T.} and Cahill, {D. G.} and S. Sinha",
year = "2009",
doi = "10.1557/proc-1172-t02-03",
language = "English (US)",
isbn = "9781615677832",
series = "Materials Research Society Symposium Proceedings",
publisher = "Materials Research Society",
pages = "72--77",
booktitle = "Nanoscale Heat Transport - From Fundamentals to Devices",
note = "2009 MRS Spring Meeting ; Conference date: 13-04-2009 Through 17-04-2009",
}