Thermal conductivity of amorphous carbon thin films

Andrew J. Bullen, Keith E. O'Hara, David G. Cahill, Othon Monteiro, Achim Von Keudell

Research output: Contribution to journalArticlepeer-review

Abstract

Thermal conductivities Λ of amorphous carbon thin films are measured in the temperatures range 80-400 K using the 3 ω method. Sample films range from soft a-C:H prepared by remote-plasma deposition (Λ = 0.20 W m-1 K-1 at room temperature) to amorphous diamond with a large fraction of sp3 bonded carbon deposited from a filtered-arc source (Λ = 2.2 W m-1 K-1). Effective-medium theory provides a phenomenological description of the variation of conductivity with mass density. The thermal conductivities are in good agreement with the minimum thermal conductivity calculated from the measured atomic density and longitudinal speed of sound.

Original languageEnglish (US)
Pages (from-to)6317-6320
Number of pages4
JournalJournal of Applied Physics
Volume88
Issue number11
DOIs
StatePublished - Dec 2000

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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