Thermal conduction from microcantilever heaters in partial vacuum

Jungchul Lee, Tanya L. Wright, Mark R. Abel, Erik O. Sunden, Alexei Marchenkov, Samuel Graham, William P. King

Research output: Contribution to journalArticlepeer-review

Abstract

This paper reports the thermal and electrical characteristics of a heated microcantilever in air and helium over a wide range of pressures. The cantilever heater size modulates thermal conductance between the cantilever and its gaseous surroundings; and the Knudsen number, Kn characterizes this thermal conductance. When Kn<1, thermal transport from the cantilever heater depends on gas pressure, and when Kn>1, thermal transport from the cantilever heater remains constant. This measurement of thermal conductance around Kn=1 could aid the design and analysis of Pirani sensors and other microscale thermal sensors and actuators.

Original languageEnglish (US)
Article number014906
JournalJournal of Applied Physics
Volume101
Issue number1
DOIs
StatePublished - 2007
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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