Abstract
This paper reports the thermal and electrical characteristics of a heated microcantilever in air and helium over a wide range of pressures. The cantilever heater size modulates thermal conductance between the cantilever and its gaseous surroundings; and the Knudsen number, Kn characterizes this thermal conductance. When Kn<1, thermal transport from the cantilever heater depends on gas pressure, and when Kn>1, thermal transport from the cantilever heater remains constant. This measurement of thermal conductance around Kn=1 could aid the design and analysis of Pirani sensors and other microscale thermal sensors and actuators.
Original language | English (US) |
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Article number | 014906 |
Journal | Journal of Applied Physics |
Volume | 101 |
Issue number | 1 |
DOIs | |
State | Published - 2007 |
Externally published | Yes |
ASJC Scopus subject areas
- General Physics and Astronomy