Thermal and mechanical characterization and calibration of heated microcantilevers

Jungchul Lee, Thomas Beechem, Keunhan Park, Zhuomin Zhang, Samuel Graham, William P. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports the thermal and mechanical characterization and calibration of heated atomic force microscope (AFM) cantilevers. The cantilevers are characterized during steady-state, pulsed, and periodic heating. Using a laser Raman technique, it is possible to measure local temperature and temperature distribution in the silicon cantilever with a resolution of 1 °C and 1 µm while providing local surface stress measurements. This work provides improved understanding of thermal, electrical, and mechanical behaviors of silicon heated AFM cantilevers thereby enabling new applications for the device.

Original languageEnglish (US)
Title of host publication2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
EditorsThomas W. Kenny, Leland Spangler
PublisherTransducer Research Foundation
Pages336-339
Number of pages4
ISBN (Electronic)0964002469, 9780964002463
StatePublished - 2006
Externally publishedYes
Event13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 - Hilton Head Island, United States
Duration: Jun 4 2006Jun 8 2006

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
Country/TerritoryUnited States
CityHilton Head Island
Period6/4/066/8/06

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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