@inproceedings{b5c11d4085174e389555938c3960fe4a,
title = "Thermal and mechanical characterization and calibration of heated microcantilevers",
abstract = "This paper reports the thermal and mechanical characterization and calibration of heated atomic force microscope (AFM) cantilevers. The cantilevers are characterized during steady-state, pulsed, and periodic heating. Using a laser Raman technique, it is possible to measure local temperature and temperature distribution in the silicon cantilever with a resolution of 1 °C and 1 µm while providing local surface stress measurements. This work provides improved understanding of thermal, electrical, and mechanical behaviors of silicon heated AFM cantilevers thereby enabling new applications for the device.",
author = "Jungchul Lee and Thomas Beechem and Keunhan Park and Zhuomin Zhang and Samuel Graham and King, {William P.}",
note = "Publisher Copyright: {\textcopyright} 2006 TRF.; 13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 ; Conference date: 04-06-2006 Through 08-06-2006",
year = "2006",
language = "English (US)",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "336--339",
editor = "Kenny, {Thomas W.} and Leland Spangler",
booktitle = "2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006",
}