The production of nanocrystalline powders by magnetron sputtering

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Magnetron sputtering has been used for the production of nanoscale particles of pure metals, binary alloys, intermetallics, and ceramics. Al, Mo, Cu91Mn9, Al52Ti 48, and ZrO2 particles with diameters of 7-50 nm were synthesized. The structures and grain sizes of the particles were examined by means of x-ray diffraction and both transmission and scanning electron microscopy. The particles were collected and compacted in situ in the sputtering chamber. The structure of these nanocrystalline materials is also described. This novel application of magnetron sputtering at high gas pressures is of interest for both the production of nanocrystalline materials and isolated clusters.

Original languageEnglish (US)
Pages (from-to)1113-1115
Number of pages3
JournalJournal of Applied Physics
Issue number2
StatePublished - 1990

ASJC Scopus subject areas

  • General Physics and Astronomy


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