The production of nanocrystalline powders by magnetron sputtering

Magnetron sputtering has been used for the production of nanoscale particles of pure metals, binary alloys, intermetallics, and ceramics. Al, Mo, Cu₉₁Mn₉, Al₅₂Ti ₄₈, and ZrO₂ particles with diameters of 7-50 nm were synthesized. The structures and grain sizes of the particles were examined by means of x-ray diffraction and both transmission and scanning electron microscopy. The particles were collected and compacted in situ in the sputtering chamber. The structure of these nanocrystalline materials is also described. This novel application of magnetron sputtering at high gas pressures is of interest for both the production of nanocrystalline materials and isolated clusters.