The long path from MEMS resonators to timing products

E. Ng, Y. Yang, V. A. Hong, C. H. Ahn, D. B. Heinz, I. Flader, Y. Chen, C. L.M. Everhart, B. Kim, R. Melamud, R. N. Candler, M. A. Hopcroft, J. C. Salvia, S. Yoneoka, A. B. Graham, M. Agarwal, M. W. Messana, K. L. Chen, H. K. Lee, S. WangG. Bahl, V. Qu, C. F. Chiang, T. W. Kenny, A. Partridge, M. Lutz, G. Yama, G. J. O'Brien

Research output: Contribution to journalConference articlepeer-review

Abstract

Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along this path, describe some of the critical technology steps, and outline some of the important non-technological events within SiTime - all of these factors contributed to the successful outcome.

Original languageEnglish (US)
Article number7050869
Pages (from-to)1-2
Number of pages2
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2015-February
Issue numberFebruary
DOIs
StatePublished - Feb 26 2015
Externally publishedYes
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: Jan 18 2015Jan 22 2015

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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