The long path from MEMS resonators to timing products

E. Ng, Y. Yang, V. A. Hong, C. H. Ahn, D. B. Heinz, I. Flader, Y. Chen, C. L.M. Everhart, B. Kim, R. Melamud, R. N. Candler, M. A. Hopcroft, J. C. Salvia, S. Yoneoka, A. B. Graham, M. Agarwal, M. W. Messana, K. L. Chen, H. K. Lee, S. WangG. Bahl, V. Qu, C. F. Chiang, T. W. Kenny, A. Partridge, M. Lutz, G. Yama, G. J. O'Brien

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along this path, describe some of the critical technology steps, and outline some of the important non-technological events within SiTime - all of these factors contributed to the successful outcome.

Original languageEnglish (US)
Title of host publication2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-2
Number of pages2
EditionFebruary
ISBN (Electronic)9781479979554
DOIs
StatePublished - Feb 26 2015
Externally publishedYes
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: Jan 18 2015Jan 22 2015

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
NumberFebruary
Volume2015-February
ISSN (Print)1084-6999

Other

Other2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/TerritoryPortugal
CityEstoril
Period1/18/151/22/15

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'The long path from MEMS resonators to timing products'. Together they form a unique fingerprint.

Cite this