The long path from MEMS resonators to timing products

E. Ng; Y. Yang; V. A. Hong; C. H. Ahn; D. B. Heinz; I. Flader; Y. Chen; C. L.M. Everhart; B. Kim; R. Melamud; R. N. Candler; M. A. Hopcroft; J. C. Salvia; S. Yoneoka; A. B. Graham; M. Agarwal; M. W. Messana; K. L. Chen; H. K. Lee; S. Wang; G. Bahl; V. Qu; C. F. Chiang; T. W. Kenny; A. Partridge; M. Lutz; G. Yama; G. J. O'Brien

doi:10.1109/MEMSYS.2015.7050869

The long path from MEMS resonators to timing products

E. Ng, Y. Yang, V. A. Hong, C. H. Ahn, D. B. Heinz, I. Flader, Y. Chen, C. L.M. Everhart, B. Kim, R. Melamud, R. N. Candler, M. A. Hopcroft, J. C. Salvia, S. Yoneoka, A. B. Graham, M. Agarwal, M. W. Messana, K. L. Chen, H. K. Lee, S. WangG. Bahl, V. Qu, C. F. Chiang, T. W. Kenny, A. Partridge, M. Lutz, G. Yama, G. J. O'Brien

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along this path, describe some of the critical technology steps, and outline some of the important non-technological events within SiTime - all of these factors contributed to the successful outcome.

Original language	English (US)
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1-2
Number of pages	2
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7050869
State	Published - Feb 26 2015
Externally published	Yes
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: Jan 18 2015 → Jan 22 2015

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	1/18/15 → 1/22/15

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Online availability

10.1109/MEMSYS.2015.7050869

Library availability

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Cite this

Ng, E., Yang, Y., Hong, V. A., Ahn, C. H., Heinz, D. B., Flader, I., Chen, Y., Everhart, C. L. M., Kim, B., Melamud, R., Candler, R. N., Hopcroft, M. A., Salvia, J. C., Yoneoka, S., Graham, A. B., Agarwal, M., Messana, M. W., Chen, K. L., Lee, H. K., ... O'Brien, G. J. (2015). The long path from MEMS resonators to timing products. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 1-2). Article 7050869 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050869

The long path from MEMS resonators to timing products. / Ng, E.; Yang, Y.; Hong, V. A. et al.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 1-2 7050869 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ng, E, Yang, Y, Hong, VA, Ahn, CH, Heinz, DB, Flader, I, Chen, Y, Everhart, CLM, Kim, B, Melamud, R, Candler, RN, Hopcroft, MA, Salvia, JC, Yoneoka, S, Graham, AB, Agarwal, M, Messana, MW, Chen, KL, Lee, HK, Wang, S, Bahl, G, Qu, V, Chiang, CF, Kenny, TW, Partridge, A, Lutz, M, Yama, G & O'Brien, GJ 2015, The long path from MEMS resonators to timing products. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7050869, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 1-2, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 1/18/15. https://doi.org/10.1109/MEMSYS.2015.7050869

Ng E, Yang Y, Hong VA, Ahn CH, Heinz DB, Flader I et al. The long path from MEMS resonators to timing products. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 1-2. 7050869. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7050869

Ng, E. ; Yang, Y. ; Hong, V. A. et al. / The long path from MEMS resonators to timing products. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 1-2 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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AU - Qu, V.

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ER -

The long path from MEMS resonators to timing products

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