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The effects of surface roughness characterized by fractal geometry on sputtering
David N. Ruzic
Nuclear, Plasma, and Radiological Engineering
Micro and Nanotechnology Lab
Office of the Provost
Electrical and Computer Engineering
Biomedical and Translational Sciences
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Dive into the research topics of 'The effects of surface roughness characterized by fractal geometry on sputtering'. Together they form a unique fingerprint.
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Keyphrases
Angular Distribution
50%
Atomic Scale
50%
Binary Collision
50%
Computer Code
50%
Energy Distribution
50%
Fractal Dimension
100%
Fractal Geometry
100%
Incidence Angle
50%
Low Energy
50%
Normal Angle
50%
Reflection Coefficient
50%
Sputtering Yield
50%
Surface Roughness
50%
Surface Roughness Effect
100%
Yield Coefficient
50%
Engineering
Angle of Incidence
50%
Angular Distribution
50%
Energy Distribution
50%
Energy Engineering
50%
Fractal Dimension
100%
Fractal Geometry
100%
Reflection Coefficient
50%
Sputtering Yield
50%
Mathematics
Computer Code
50%
Fractal Dimension
100%
Fractal Geometry
100%
Reflection Coefficient
50%
Material Science
Surface Roughness
100%