The effects of surface roughness characterized by fractal geometry on sputtering

David N. Ruzic

doi:10.1016/0168-583X(90)90019-Q

The effects of surface roughness characterized by fractal geometry on sputtering

David N. Ruzic

Research output: Contribution to journal › Article › peer-review

Abstract

Fractal geometry has been added to the binary-collision TRIM computer code to simulate realistic atomic-scale surface roughness. This inclusion significantly affects TRIM sputtering yields and reflection coefficients at low energies (10s to 100s of eV) and non-normal angles of incidence. Results are shown and favorably compared to experiments for H and C sputtering of C as a function of angle, energy and fractal dimension. Energy and angular distributions of the sputtered and reflected particles as a function of fractal dimension are also shown.

Original language	English (US)
Pages (from-to)	118-125
Number of pages	8
Journal	Nuclear Inst. and Methods in Physics Research, B
Volume	47
Issue number	2
DOIs	https://doi.org/10.1016/0168-583X(90)90019-Q
State	Published - Apr 1 1990

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

Online availability

10.1016/0168-583X(90)90019-Q

Library availability

Discover UIUC Full Text

Cite this

@article{408e9ac17184496d8ff753d458bd3355,

title = "The effects of surface roughness characterized by fractal geometry on sputtering",

abstract = "Fractal geometry has been added to the binary-collision TRIM computer code to simulate realistic atomic-scale surface roughness. This inclusion significantly affects TRIM sputtering yields and reflection coefficients at low energies (10s to 100s of eV) and non-normal angles of incidence. Results are shown and favorably compared to experiments for H and C sputtering of C as a function of angle, energy and fractal dimension. Energy and angular distributions of the sputtered and reflected particles as a function of fractal dimension are also shown.",

author = "Ruzic, \{David N.\}",

note = "I wish to thank and acknowledge the Max Planck Institut fur Plasmaphysik for permission to use the TRIM code and Dr. Wolfgang Eckstein for many illuminating discussions. Computer time was granted by the National Center for Super Computing Applications at the University of Illinois, and funding was provided by the Presidential Young Investigator Program of the US National Science Foundation (CBT-84-51599).",

year = "1990",

month = apr,

day = "1",

doi = "10.1016/0168-583X(90)90019-Q",

language = "English (US)",

volume = "47",

pages = "118--125",

journal = "Nuclear Inst. and Methods in Physics Research, B",

issn = "0168-583X",

publisher = "Elsevier B.V.",

number = "2",

}

TY - JOUR

T1 - The effects of surface roughness characterized by fractal geometry on sputtering

AU - Ruzic, David N.

N1 - I wish to thank and acknowledge the Max Planck Institut fur Plasmaphysik for permission to use the TRIM code and Dr. Wolfgang Eckstein for many illuminating discussions. Computer time was granted by the National Center for Super Computing Applications at the University of Illinois, and funding was provided by the Presidential Young Investigator Program of the US National Science Foundation (CBT-84-51599).

PY - 1990/4/1

Y1 - 1990/4/1

N2 - Fractal geometry has been added to the binary-collision TRIM computer code to simulate realistic atomic-scale surface roughness. This inclusion significantly affects TRIM sputtering yields and reflection coefficients at low energies (10s to 100s of eV) and non-normal angles of incidence. Results are shown and favorably compared to experiments for H and C sputtering of C as a function of angle, energy and fractal dimension. Energy and angular distributions of the sputtered and reflected particles as a function of fractal dimension are also shown.

AB - Fractal geometry has been added to the binary-collision TRIM computer code to simulate realistic atomic-scale surface roughness. This inclusion significantly affects TRIM sputtering yields and reflection coefficients at low energies (10s to 100s of eV) and non-normal angles of incidence. Results are shown and favorably compared to experiments for H and C sputtering of C as a function of angle, energy and fractal dimension. Energy and angular distributions of the sputtered and reflected particles as a function of fractal dimension are also shown.

UR - https://www.scopus.com/pages/publications/0000584835

UR - https://www.scopus.com/pages/publications/0000584835#tab=citedBy

U2 - 10.1016/0168-583X(90)90019-Q

DO - 10.1016/0168-583X(90)90019-Q

M3 - Article

AN - SCOPUS:0000584835

SN - 0168-583X

VL - 47

SP - 118

EP - 125

JO - Nuclear Inst. and Methods in Physics Research, B

JF - Nuclear Inst. and Methods in Physics Research, B

IS - 2

ER -

The effects of surface roughness characterized by fractal geometry on sputtering

Abstract

ASJC Scopus subject areas

Online availability

Library availability

Related links

Fingerprint

Cite this