Abstract
Fractal geometry has been added to the binary-collision TRIM computer code to simulate realistic atomic-scale surface roughness. This inclusion significantly affects TRIM sputtering yields and reflection coefficients at low energies (10s to 100s of eV) and non-normal angles of incidence. Results are shown and favorably compared to experiments for H and C sputtering of C as a function of angle, energy and fractal dimension. Energy and angular distributions of the sputtered and reflected particles as a function of fractal dimension are also shown.
Original language | English (US) |
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Pages (from-to) | 118-125 |
Number of pages | 8 |
Journal | Nuclear Inst. and Methods in Physics Research, B |
Volume | 47 |
Issue number | 2 |
DOIs | |
State | Published - Apr 1 1990 |
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Instrumentation