TY - JOUR
T1 - The effects of surface roughness characterized by fractal geometry on sputtering
AU - Ruzic, David N.
N1 - Funding Information:
I wish to thank and acknowledge the Max Planck Institut fur Plasmaphysik for permission to use the TRIM code and Dr. Wolfgang Eckstein for many illuminating discussions. Computer time was granted by the National Center for Super Computing Applications at the University of Illinois, and funding was provided by the Presidential Young Investigator Program of the US National Science Foundation (CBT-84-51599).
PY - 1990/4/1
Y1 - 1990/4/1
N2 - Fractal geometry has been added to the binary-collision TRIM computer code to simulate realistic atomic-scale surface roughness. This inclusion significantly affects TRIM sputtering yields and reflection coefficients at low energies (10s to 100s of eV) and non-normal angles of incidence. Results are shown and favorably compared to experiments for H and C sputtering of C as a function of angle, energy and fractal dimension. Energy and angular distributions of the sputtered and reflected particles as a function of fractal dimension are also shown.
AB - Fractal geometry has been added to the binary-collision TRIM computer code to simulate realistic atomic-scale surface roughness. This inclusion significantly affects TRIM sputtering yields and reflection coefficients at low energies (10s to 100s of eV) and non-normal angles of incidence. Results are shown and favorably compared to experiments for H and C sputtering of C as a function of angle, energy and fractal dimension. Energy and angular distributions of the sputtered and reflected particles as a function of fractal dimension are also shown.
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U2 - 10.1016/0168-583X(90)90019-Q
DO - 10.1016/0168-583X(90)90019-Q
M3 - Article
AN - SCOPUS:0000584835
SN - 0168-583X
VL - 47
SP - 118
EP - 125
JO - Nuclear Inst. and Methods in Physics Research, B
JF - Nuclear Inst. and Methods in Physics Research, B
IS - 2
ER -