The effects of surface roughness characterized by fractal geometry on sputtering

Research output: Contribution to journalArticle

Abstract

Fractal geometry has been added to the binary-collision TRIM computer code to simulate realistic atomic-scale surface roughness. This inclusion significantly affects TRIM sputtering yields and reflection coefficients at low energies (10s to 100s of eV) and non-normal angles of incidence. Results are shown and favorably compared to experiments for H and C sputtering of C as a function of angle, energy and fractal dimension. Energy and angular distributions of the sputtered and reflected particles as a function of fractal dimension are also shown.

Original languageEnglish (US)
Pages (from-to)118-125
Number of pages8
JournalNuclear Inst. and Methods in Physics Research, B
Volume47
Issue number2
DOIs
StatePublished - Apr 1 1990

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ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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