Fractal geometry has been added to the binary-collision TRIM computer code to simulate realistic atomic-scale surface roughness. This inclusion significantly affects TRIM sputtering yields and reflection coefficients at low energies (10s to 100s of eV) and non-normal angles of incidence. Results are shown and favorably compared to experiments for H and C sputtering of C as a function of angle, energy and fractal dimension. Energy and angular distributions of the sputtered and reflected particles as a function of fractal dimension are also shown.
ASJC Scopus subject areas
- Nuclear and High Energy Physics