@article{a921ada06da74ee89fe07e8c022a7d32,
title = "The effects of radio frequency waves on the sputtering of ion cyclotron resonance heating antenna Faraday shields",
author = "Caughman, {J. B.O.} and Ruzic, {D. N.} and Hoffman, {D. J.}",
note = "Copyright: Copyright 2016 Elsevier B.V., All rights reserved.",
year = "1987",
month = jul,
day = "1",
doi = "10.1116/1.574440",
language = "English (US)",
volume = "5",
pages = "2301--2304",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "4",
}