The effects of radio frequency waves on the sputtering of ion cyclotron resonance heating antenna Faraday shields

J. B.O. Caughman, D. N. Ruzic, D. J. Hoffman

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)2301-2304
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume5
Issue number4
DOIs
StatePublished - Jul 1 1987

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this