The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing

A. Loui; F. T. Goericke; T. V. Ratto; J. Lee; B. R. Hart; W. P. King

doi:10.1016/j.sna.2008.06.016

The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing

A. Loui, F. T. Goericke, T. V. Ratto, J. Lee, B. R. Hart, W. P. King

Research output: Contribution to journal › Article › peer-review

Abstract

We have designed, fabricated, and tested five piezoresistive cantilever configurations to investigate the effect of shape and piezoresistor placement on the sensitivity of microcantilevers under both point loading and surface stress loading. The experimental study reveals that: (1) high aspect ratio cantilevers that are much longer than they are wide are optimal for point-loading applications such as microscopy and force measurements; (2) low aspect ratio cantilevers that are short and wide are optimal for surface stress-loading scenarios such as those that occur in biological and chemical sensor applications. The sensitivity data for both point loads and surface stress are consistent with previously developed finite-element models.

Original language	English (US)
Pages (from-to)	516-521
Number of pages	6
Journal	Sensors and Actuators, A: Physical
Volume	147
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2008.06.016
State	Published - Oct 3 2008

Keywords

Atomic force microscopy
Cantilever sensor
Chemical sensing
Piezoresistor
Surface stress

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Online availability

10.1016/j.sna.2008.06.016

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title = "The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing",

abstract = "We have designed, fabricated, and tested five piezoresistive cantilever configurations to investigate the effect of shape and piezoresistor placement on the sensitivity of microcantilevers under both point loading and surface stress loading. The experimental study reveals that: (1) high aspect ratio cantilevers that are much longer than they are wide are optimal for point-loading applications such as microscopy and force measurements; (2) low aspect ratio cantilevers that are short and wide are optimal for surface stress-loading scenarios such as those that occur in biological and chemical sensor applications. The sensitivity data for both point loads and surface stress are consistent with previously developed finite-element models.",

keywords = "Atomic force microscopy, Cantilever sensor, Chemical sensing, Piezoresistor, Surface stress",

author = "A. Loui and Goericke, {F. T.} and Ratto, {T. V.} and J. Lee and Hart, {B. R.} and King, {W. P.}",

note = "Funding Information: This work was performed under the auspices of the U.S. Department of Energy by Lawrence Livermore National Laboratory under Contract DE-AC52-07NA27344. We thank D. Sirbuly and M. Stadermann for laboratory assistance.",

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T1 - The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing

AU - Loui, A.

AU - Goericke, F. T.

AU - Ratto, T. V.

AU - Lee, J.

AU - Hart, B. R.

AU - King, W. P.

N1 - Funding Information: This work was performed under the auspices of the U.S. Department of Energy by Lawrence Livermore National Laboratory under Contract DE-AC52-07NA27344. We thank D. Sirbuly and M. Stadermann for laboratory assistance.

PY - 2008/10/3

Y1 - 2008/10/3

N2 - We have designed, fabricated, and tested five piezoresistive cantilever configurations to investigate the effect of shape and piezoresistor placement on the sensitivity of microcantilevers under both point loading and surface stress loading. The experimental study reveals that: (1) high aspect ratio cantilevers that are much longer than they are wide are optimal for point-loading applications such as microscopy and force measurements; (2) low aspect ratio cantilevers that are short and wide are optimal for surface stress-loading scenarios such as those that occur in biological and chemical sensor applications. The sensitivity data for both point loads and surface stress are consistent with previously developed finite-element models.

AB - We have designed, fabricated, and tested five piezoresistive cantilever configurations to investigate the effect of shape and piezoresistor placement on the sensitivity of microcantilevers under both point loading and surface stress loading. The experimental study reveals that: (1) high aspect ratio cantilevers that are much longer than they are wide are optimal for point-loading applications such as microscopy and force measurements; (2) low aspect ratio cantilevers that are short and wide are optimal for surface stress-loading scenarios such as those that occur in biological and chemical sensor applications. The sensitivity data for both point loads and surface stress are consistent with previously developed finite-element models.

KW - Atomic force microscopy

KW - Cantilever sensor

KW - Chemical sensing

KW - Piezoresistor

KW - Surface stress

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M3 - Article

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JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

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ER -

The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing

Abstract

Keywords

ASJC Scopus subject areas

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