The discovery of III-V oxidation, device progress, and application to vertical-cavity surface-emitting lasers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The discovery of III-V oxidation and subsequent application of oxide technology to the fabrication of semiconductor lasers are reviewed. Work on lateral oxidation and the application of laterally oxidized layers to form optically and electrically confining apertures is discussed, as well as the commercially-significant use of lateral oxides in vertical-cavity surface-emitting lasers.

Original languageEnglish (US)
Title of host publication2013 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2013
Pages33-36
Number of pages4
StatePublished - Nov 15 2013
Event28th International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2013 - New Orleans, LA, United States
Duration: May 13 2013May 16 2013

Publication series

Name2013 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2013

Other

Other28th International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2013
CountryUnited States
CityNew Orleans, LA
Period5/13/135/16/13

Keywords

  • Device fabrication
  • III-V oxidation
  • Iii-v materials
  • Optical communications
  • Semiconductor lasers
  • Vcsels

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'The discovery of III-V oxidation, device progress, and application to vertical-cavity surface-emitting lasers'. Together they form a unique fingerprint.

Cite this