Abstract
We have developed a novel strategy for producing nanopores in inorganic, CMOS-compatible membranes using a tightly focused, high energy electron beam. We are able to characterize the nanopores physically (TEM, AFM) as well as electrically (ionic conductivity and "wetting" curves). Subsequently, we used the nanopore as a molecular Coulter counter to detect the size of a DNA molecule. This is the first report of the use of an inorganic nanopore for discriminating DNA molecules.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 767-770 |
| Number of pages | 4 |
| Journal | Technical Digest - International Electron Devices Meeting |
| State | Published - Dec 1 2003 |
| Event | IEEE International Electron Devices Meeting - Washington, DC, United States Duration: Dec 8 2003 → Dec 10 2003 |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry
Cite this
The Detection of DNA using a Silicon Nanopore. / Heng, J. B.; Dimitrov, V.; Grinkova, Y. V.; Ho, C.; Kim, T.; Muller, D.; Sligar, Stephen; Sorsch, T.; Twesten, R.; Timp, R.; Timp, G.
In: Technical Digest - International Electron Devices Meeting, 01.12.2003, p. 767-770.Research output: Contribution to journal › Conference article
}
TY - JOUR
T1 - The Detection of DNA using a Silicon Nanopore
AU - Heng, J. B.
AU - Dimitrov, V.
AU - Grinkova, Y. V.
AU - Ho, C.
AU - Kim, T.
AU - Muller, D.
AU - Sligar, Stephen
AU - Sorsch, T.
AU - Twesten, R.
AU - Timp, R.
AU - Timp, G.
PY - 2003/12/1
Y1 - 2003/12/1
N2 - We have developed a novel strategy for producing nanopores in inorganic, CMOS-compatible membranes using a tightly focused, high energy electron beam. We are able to characterize the nanopores physically (TEM, AFM) as well as electrically (ionic conductivity and "wetting" curves). Subsequently, we used the nanopore as a molecular Coulter counter to detect the size of a DNA molecule. This is the first report of the use of an inorganic nanopore for discriminating DNA molecules.
AB - We have developed a novel strategy for producing nanopores in inorganic, CMOS-compatible membranes using a tightly focused, high energy electron beam. We are able to characterize the nanopores physically (TEM, AFM) as well as electrically (ionic conductivity and "wetting" curves). Subsequently, we used the nanopore as a molecular Coulter counter to detect the size of a DNA molecule. This is the first report of the use of an inorganic nanopore for discriminating DNA molecules.
UR - http://www.scopus.com/inward/record.url?scp=17644438133&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=17644438133&partnerID=8YFLogxK
M3 - Conference article
AN - SCOPUS:17644438133
SP - 767
EP - 770
JO - Technical Digest - International Electron Devices Meeting
JF - Technical Digest - International Electron Devices Meeting
SN - 0163-1918
ER -