Abstract
We have developed a novel strategy for producing nanopores in inorganic, CMOS-compatible membranes using a tightly focused, high energy electron beam. We are able to characterize the nanopores physically (TEM, AFM) as well as electrically (ionic conductivity and "wetting" curves). Subsequently, we used the nanopore as a molecular Coulter counter to detect the size of a DNA molecule. This is the first report of the use of an inorganic nanopore for discriminating DNA molecules.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 767-770 |
| Number of pages | 4 |
| Journal | Technical Digest - International Electron Devices Meeting |
| State | Published - Dec 1 2003 |
| Event | IEEE International Electron Devices Meeting - Washington, DC, United States Duration: Dec 8 2003 → Dec 10 2003 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry
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Cite this
Heng, J. B., Dimitrov, V., Grinkova, Y. V., Ho, C., Kim, T., Muller, D., Sugar, S., Sorsch, T., Twesten, R., Timp, R., & Timp, G. (2003). The Detection of DNA using a Silicon Nanopore. Technical Digest - International Electron Devices Meeting, 767-770.