The Detection of DNA using a Silicon Nanopore

J. B. Heng; V. Dimitrov; Y. V. Grinkova; C. Ho; T. Kim; D. Muller; S. Sugar; T. Sorsch; R. Twesten; R. Timp; G. Timp

The Detection of DNA using a Silicon Nanopore

J. B. Heng, V. Dimitrov, Y. V. Grinkova, C. Ho, T. Kim, D. Muller, S. Sugar, T. Sorsch, R. Twesten, R. Timp, G. Timp

Biochemistry

Research output: Contribution to journal › Conference article › peer-review

Abstract

We have developed a novel strategy for producing nanopores in inorganic, CMOS-compatible membranes using a tightly focused, high energy electron beam. We are able to characterize the nanopores physically (TEM, AFM) as well as electrically (ionic conductivity and "wetting" curves). Subsequently, we used the nanopore as a molecular Coulter counter to detect the size of a DNA molecule. This is the first report of the use of an inorganic nanopore for discriminating DNA molecules.

Original language	English (US)
Pages (from-to)	767-770
Number of pages	4
Journal	Technical Digest - International Electron Devices Meeting
State	Published - Dec 1 2003
Event	IEEE International Electron Devices Meeting - Washington, DC, United States Duration: Dec 8 2003 → Dec 10 2003

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

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T1 - The Detection of DNA using a Silicon Nanopore

AU - Heng, J. B.

AU - Dimitrov, V.

AU - Grinkova, Y. V.

AU - Ho, C.

AU - Kim, T.

AU - Muller, D.

AU - Sugar, S.

AU - Sorsch, T.

AU - Twesten, R.

AU - Timp, R.

AU - Timp, G.

PY - 2003/12/1

Y1 - 2003/12/1

N2 - We have developed a novel strategy for producing nanopores in inorganic, CMOS-compatible membranes using a tightly focused, high energy electron beam. We are able to characterize the nanopores physically (TEM, AFM) as well as electrically (ionic conductivity and "wetting" curves). Subsequently, we used the nanopore as a molecular Coulter counter to detect the size of a DNA molecule. This is the first report of the use of an inorganic nanopore for discriminating DNA molecules.

AB - We have developed a novel strategy for producing nanopores in inorganic, CMOS-compatible membranes using a tightly focused, high energy electron beam. We are able to characterize the nanopores physically (TEM, AFM) as well as electrically (ionic conductivity and "wetting" curves). Subsequently, we used the nanopore as a molecular Coulter counter to detect the size of a DNA molecule. This is the first report of the use of an inorganic nanopore for discriminating DNA molecules.

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M3 - Conference article

AN - SCOPUS:17644438133

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JO - Technical Digest - International Electron Devices Meeting

JF - Technical Digest - International Electron Devices Meeting

SN - 0163-1918

T2 - IEEE International Electron Devices Meeting

Y2 - 8 December 2003 through 10 December 2003

ER -

The Detection of DNA using a Silicon Nanopore

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