@inproceedings{e027651042fa4277ac5fc7a704dc9236,
title = "Temperature dependent implantation of As-Isoelectronic Impurity in GaN Micro and Nanostructures",
abstract = "To enhance solar photo absorption of III-N semiconductors, we demonstrate Arsenic implantation at elevated temperatures, improving doping activation and reducing crystal damage.",
keywords = "Arsenic, Crystals, Doping profiles, Electro-optic effects, Impurities, Lattices, Metals, Nanostructures, Photonic band gap, Temperature dependence",
author = "Aadil Waseem and Clarence Chan and Xihang Wu and Yujie Liu and Yifan Shen and Manos Kapritsos and Norris, \{Theodore B.\} and Xiuling Li",
note = "This work was supported in part by United States Army Research Office Award No. W911NF2110337.; 2024 Conference on Lasers and Electro-Optics, CLEO 2024 ; Conference date: 07-05-2024 Through 10-05-2024",
year = "2024",
doi = "10.1364/cleo\_si.2024.sm2l.5",
language = "English (US)",
series = "2024 Conference on Lasers and Electro-Optics, CLEO 2024",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 Conference on Lasers and Electro-Optics, CLEO 2024",
address = "United States",
}