Temperature dependent characteristics of β-Ga₂O₃ FinFETs by MacEtch

Keyphrases

• Temperature-dependent Characteristics 100%
• MacEtch 100%
• Ga2O3 100%
• Fin Field-effect Transistor (FinFET) 100%
• MOSFET 50%
• Subthreshold Swing 50%
• High-temperature Performance 33%
• Ron,sp 33%
• Aluminum Oxide 16%
• Hysteresis 16%
• Gate Metal 16%
• High Aspect Ratio 16%
• Junction-less 16%
• Gate Oxide 16%
• Increased Temperature 16%
• Epilayer 16%
• Metal-assisted Chemical Etching 16%
• Negative Shift 16%
• Threshold Voltage 16%
• Exposure Effects 16%
• Thermal Exposure 16%
• High Power Electronics 16%
• On-resistance 16%
• Power Electronics Applications 16%
• Ioff 16%
• Thermal Degradation Mechanism 16%
• Thick Epilayer 16%
• Thermal Stability Mechanism 16%

Engineering

• Metal-Oxide-Semiconductor Field-Effect Transistor 100%
• Metal Gate 33%
• Degradation Mechanism 33%
• Gate Oxide 33%
• Increasing Temperature 33%
• High Aspect Ratio 33%
• High Power Electronics 33%
• Thermal Exposure 33%
• Exposure Effect 33%

Material Science

• Metal-Oxide-Semiconductor Field-Effect Transistor 100%
• Epilayers 66%
• Al2O3 33%
• Oxide Compound 33%
• Thermal Stability 33%
• Thermal Degradation 33%