TEM based high resolution and low-dose scanning electron nanodiffraction technique for nanostructure imaging and analysis

Kyou Hyun Kim, Hui Xing, Jian Min Zuo, Peng Zhang, Haifeng Wang

Research output: Contribution to journalArticlepeer-review

Abstract

We report a high resolution and low-dose scanning electron nanodiffraction (SEND) technique for nanostructure analysis. The SEND patterns are recorded in a transmission electron microscope (TEM) using a low-brightness ~2nm electron beam with a LaB6 thermionic source obtained by a large demagnification of the condenser 1 lens. The diffraction pattern is directly recorded using a CCD camera optimized for low-dose imaging. A custom script was developed for calibration and automated data acquisition. The performance of low-dose SEND is evaluated using nanostructured Au as a test sample for the quality of diffraction patterns, sample stability and probe size. We demonstrate that our method provides an effective and robust way for recording diffraction patterns from nanometer-sized grains.

Original languageEnglish (US)
Pages (from-to)39-45
Number of pages7
JournalMicron
Volume71
DOIs
StatePublished - Apr 1 2015

ASJC Scopus subject areas

  • Structural Biology
  • Materials Science(all)
  • Physics and Astronomy(all)
  • Cell Biology

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