Abstract
Wet oxidation of AlGaAs alloys, pioneered at the University of Illinois a decade ago, recently has been used to fabricate high performance vertical-cavity surface emitting lasers (VCSELs). The superior properties of oxide-confined VCSELs has stimulated interest in understanding the fundamentals of wet oxidation. We briefly review the technology of selective oxidation of III-V alloys, including the oxide microstructure and oxidation processing as well as describe its application to selectively oxidized VCSELs.
| Original language | English (US) |
|---|---|
| Pages | 209-213 |
| Number of pages | 5 |
| State | Published - 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1998 10th Conference on Semiconducting and Insulating Materials (SIMC-X) - Berkeley, CA, USA Duration: Jun 1 1998 → Jun 5 1998 |
Other
| Other | Proceedings of the 1998 10th Conference on Semiconducting and Insulating Materials (SIMC-X) |
|---|---|
| City | Berkeley, CA, USA |
| Period | 6/1/98 → 6/5/98 |
ASJC Scopus subject areas
- Engineering(all)