Keyphrases
Annealing
100%
Sputter-deposited
100%
Mechanical Properties
100%
Dimensional Stability
100%
Nanotwins
100%
Tungsten Film
100%
Nickel-molybdenum
100%
Micro-electro-mechanical Systems
66%
System Application
66%
High Thermal Conductivity
33%
Strength Stability
33%
Molybdenum
33%
High Density
33%
Alloy Films
33%
Grain Growth
33%
High Electrical Conductivity
33%
Mechanical Behavior
33%
Excellent Mechanical Properties
33%
Ductility
33%
Solid Solution
33%
Structural Materials
33%
Magnetron Sputtering
33%
Tungsten
33%
W Film
33%
Metallic Alloys
33%
Ultra-high
33%
Brittle Behavior
33%
Direct Current
33%
Microstructural Stability
33%
Heat Treatment
33%
Tensile Ductility
33%
Property Stability
33%
W Alloys
33%
High Tensile Strength
33%
Grain nucleation
33%
Low Coefficient of Thermal Expansion
33%
Conductivity Stability
33%
Engineering
Dimensional Stability
100%
Microelectromechanical System
66%
High Thermal Conductivity
33%
Coefficient of Thermal Expansion
33%
Magnetron
33%
Ultimate Tensile Strength
33%
Tensiles
33%
Structural Materials
33%
High Electrical Conductivity
33%
Subsequent Heat Treatment
33%
Solid Solutions
33%
Direct Current
33%
Material Science
Film
100%
Molybdenum
100%
Tungsten
100%
Microelectromechanical System
33%
Building Material
16%
Density
16%
Thermal Conductivity
16%
Nucleation
16%
Electrical Conductivity
16%
Thermal Expansion
16%
Ultimate Tensile Strength
16%
Heat Treatment
16%
Solid Solutions
16%