Synthesis of Tantalum Pentoxide films for high temperature applications

Keyphrases

• High Temperature Applications 100%
• Tantalum Pentafluoride 100%
• Ta2O5 Film 100%
• Optical Properties 50%
• High Temperature 50%
• Crack-free 50%
• Waveguide 50%
• Aging 50%
• Microdevice 50%
• Sol-gel 50%
• Binder 50%
• Spin Coating 50%
• Quartz Substrate 50%
• Spin Rate 50%
• Nanoporous Film 50%

Material Science

• Film 100%
• Tantalum 100%
• Optical Property 20%
• Silicon 20%
• Waveguide 20%
• Sol-Gel 20%
• Microdevices 20%
• Spin Coating 20%