Synthesis of granular systems by cluster beam deposition

Granular films were prepared by simultaneous cluster beam and physical vapor deposition. The clusters are formed by high pressure sputtering and have an average size between 2 and 5 nm. This method makes it possible to control the granule size and concentration, which is not possible using precipitation synthesis of granular alloys. Most importantly, a diverse set of granule/matrix systems are accessible by this system. The method is illustrated for systems of interest for giant magneto-resistance applications: Co/Cu (miscible), and Co/Cr (immiscible.) Synthesis of films with isolated embedded clusters of more complex structures, e.g. intermetallics Ni₃Al and Cu₃Au, are also discussed.