Symmetry quantification and mapping using convergent beam electron diffraction

Kyou Hyun Kim, Jian Min Zuo

Research output: Contribution to journalArticle


We propose a new algorithm to quantify symmetry recorded in convergent beam electron diffraction (CBED) patterns and use it for symmetry mapping in materials applications. We evaluate the effectiveness of the profile R-factor (Rp) and the normalized cross-correlation coefficient (γ) for quantifying the amount of symmetry in a CBED pattern. The symmetry quantification procedures are automated and the algorithm is implemented as a DM (Digital Micrograph©) script. Experimental and simulated CBED patterns recorded from a Si single crystal are used to calibrate the proposed algorithm for the symmetry quantification. The proposed algorithm is then applied to a Si sample with defects to test the sensitivity of symmetry quantification to defects. Using the mirror symmetry as an example, we demonstrate that the normalized cross-correlation coefficient provides an effective and robust measurement of the symmetry recorded in experimental CBED patterns.

Original languageEnglish (US)
Pages (from-to)71-76
Number of pages6
StatePublished - Jan 1 2013


  • Convergent beam electron diffraction
  • Crystal Symmetry
  • Scanning electron diffraction
  • Symmetry mapping

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Electronic, Optical and Magnetic Materials

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