Suspended membrane single crystal Silicon micro hotplate for differential scanning calorimetry

J. Lee; C. M. Spadaccini; E. V. Mukerjee; W. P. King

doi:10.1109/MEMSYS.2009.4805517

Suspended membrane single crystal Silicon micro hotplate for differential scanning calorimetry

J. Lee, C. M. Spadaccini, E. V. Mukerjee, W. P. King

Research output: Contribution to journal › Conference article › peer-review

Abstract

This paper introduces an array of single crystal silicon micro hotplates for differential scanning calorimetry. Based on heat transfer analysis considering tradeoffs between response time, temperature uniformity, and measurement sensitivity, suspended membrane micro hotplates with full backside release were found to be optimal designs. Due to the requirements of routine sample loading, the size of the heater is 100 or 200 μm while the size of the backside membrane cavity is 400 ,pm. Our design achieves a combination of time constant, temperature sensitivity, and heating efficiency that are comparable or superior to previously reported microcalorimeters.

Original language	English (US)
Article number	4805517
Pages (from-to)	852-855
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805517
State	Published - 2009
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: Jan 25 2009 → Jan 29 2009

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Online availability

10.1109/MEMSYS.2009.4805517

Library availability

Discover UIUC Full Text

Cite this

@article{95f4f65e89ec476a98860e0cbf8dad46,

title = "Suspended membrane single crystal Silicon micro hotplate for differential scanning calorimetry",

abstract = "This paper introduces an array of single crystal silicon micro hotplates for differential scanning calorimetry. Based on heat transfer analysis considering tradeoffs between response time, temperature uniformity, and measurement sensitivity, suspended membrane micro hotplates with full backside release were found to be optimal designs. Due to the requirements of routine sample loading, the size of the heater is 100 or 200 μm while the size of the backside membrane cavity is 400 ,pm. Our design achieves a combination of time constant, temperature sensitivity, and heating efficiency that are comparable or superior to previously reported microcalorimeters.",

author = "J. Lee and Spadaccini, {C. M.} and Mukerjee, {E. V.} and King, {W. P.}",

year = "2009",

doi = "10.1109/MEMSYS.2009.4805517",

language = "English (US)",

pages = "852--855",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 ; Conference date: 25-01-2009 Through 29-01-2009",

}

TY - JOUR

T1 - Suspended membrane single crystal Silicon micro hotplate for differential scanning calorimetry

AU - Lee, J.

AU - Spadaccini, C. M.

AU - Mukerjee, E. V.

AU - King, W. P.

PY - 2009

Y1 - 2009

N2 - This paper introduces an array of single crystal silicon micro hotplates for differential scanning calorimetry. Based on heat transfer analysis considering tradeoffs between response time, temperature uniformity, and measurement sensitivity, suspended membrane micro hotplates with full backside release were found to be optimal designs. Due to the requirements of routine sample loading, the size of the heater is 100 or 200 μm while the size of the backside membrane cavity is 400 ,pm. Our design achieves a combination of time constant, temperature sensitivity, and heating efficiency that are comparable or superior to previously reported microcalorimeters.

AB - This paper introduces an array of single crystal silicon micro hotplates for differential scanning calorimetry. Based on heat transfer analysis considering tradeoffs between response time, temperature uniformity, and measurement sensitivity, suspended membrane micro hotplates with full backside release were found to be optimal designs. Due to the requirements of routine sample loading, the size of the heater is 100 or 200 μm while the size of the backside membrane cavity is 400 ,pm. Our design achieves a combination of time constant, temperature sensitivity, and heating efficiency that are comparable or superior to previously reported microcalorimeters.

UR - http://www.scopus.com/inward/record.url?scp=65949088122&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=65949088122&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2009.4805517

DO - 10.1109/MEMSYS.2009.4805517

M3 - Conference article

AN - SCOPUS:65949088122

SN - 1084-6999

SP - 852

EP - 855

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

M1 - 4805517

T2 - 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009

Y2 - 25 January 2009 through 29 January 2009

ER -

Suspended membrane single crystal Silicon micro hotplate for differential scanning calorimetry

Abstract

ASJC Scopus subject areas

Online availability

Library availability

Related links

Fingerprint

Cite this