The controlled formation of curved, three-dimensional (3-D) microstructures can be accomplished through solidification from a liquid phase. As a demonstration, we have placed objects in contact with the interface of a photopolymerizable liquid and air to create various liquid menisci that were subsequently solidified with ultraviolet radiation. Geometric control is achieved through variation of physical and environmental parameters; for example, solidified menisci formed at 25 °C were 300 μm taller than those formed at 7 °C. Comparisons between the polymerized structures and theoretical predictions for liquid menisci indicate that the polymerization process results in repeatable changes in contact angle and meniscus size.

Original languageEnglish (US)
Pages (from-to)553-558
Number of pages6
JournalJournal of Microelectromechanical Systems
Issue number4
StatePublished - Aug 2004

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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