Surface preparation for thin film growth by enhanced nucleation

John R Abelson (Inventor), Angel Yanguas-Gil (Inventor), Gregory S Girolami (Inventor), Navneet Kumar (Inventor)

Research output: Patent

Abstract

Various processes and related systems are provided for making structures on substrate surfaces. Disclosed are methods of making a structure supported by a substrate by providing a substrate having a receiving surface and exposing at least a portion of the receiving surface to output from a remote plasma of an inert gas. The remote plasma has an energy low enough to substantially avoid etching or sputtering of the receiving surface but sufficient to generate a treated receiving surface. The treated surface is contacted with a deposition gas, thereby making the structure supported by the substrate.
Original languageEnglish (US)
U.S. patent number8110503
Filing date4/26/11
StatePublished - Feb 7 2012

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