Surface erosion by highly-charged ions

Keyphrases

• Surface Erosion 100%
• Highly Charged Ions 100%
• Low Energy 50%
• Ion Bombardment 50%
• Sputtering Yield 50%
• Xe Ion 50%
• Crater Formation 50%
• Surface Roughening 25%
• State of Charge 25%
• Molecular Dynamics Simulation 25%
• Semiconductors 25%
• Si(111) 25%
• Thermal Spike 25%
• Highly Charged 25%
• Solid Surface 25%
• Si Surface 25%
• Further Development 25%
• Molecular Dynamics Method 25%
• Dynamic Simulation 25%
• Insulator 25%
• Au Surface 25%
• Ion Impact 25%
• Conductive Surface 25%
• Further Application 25%
• Charge Neutralization 25%
• Singly Charged 25%
• Extreme Ultraviolet Lithography 25%
• Surface Sputtering 25%
• Screen Surface 25%
• High Charge State 25%
• Electric Field Screen 25%
• Hollow Atoms 25%
• Coulomb Explosion 25%

Engineering

• Surface Erosion 100%
• Ion Implantation 66%
• Sputtering Yield 66%
• Conductive 33%
• Electric Field 33%
• Computer Simulation 33%
• State of Charge 33%
• Screening Surface 33%
• Dynamic Method 33%
• Si Surface 33%
• Extreme-Ultraviolet Lithography 33%
• Charge State 33%
• Coulomb Explosion 33%

Material Science

• Ion Implantation 100%
• Lithography 50%
• State-of-Charge 50%