Keyphrases
Atomic Layer Deposition
100%
2-mercaptoethanol
100%
TiO2 Film
100%
Surface Defect Engineering
100%
MoS2 Surface
80%
Surface Coverage
40%
Dielectric
40%
Surface Treatment
40%
Gap States
40%
Sulfur Vacancy
40%
TDMAT
40%
Density of States
20%
Electronic Properties
20%
Chemical Vapor Deposition
20%
Rutile
20%
Computational Study
20%
Ion Beam Irradiation
20%
DFT Calculations
20%
2D Materials
20%
Computational Approach
20%
Approaches to Study
20%
Single Vacancy
20%
Functional Devices
20%
Complete Removal
20%
Vacancy-rich
20%
Successful Integration
20%
Surface Vacancy
20%
Surface Defects
20%
Alkylamine
20%
Coverage Metrics
20%
Ar Ion Beam
20%
Discontinuous Film
20%
Thermal Atomic Layer Deposition
20%
MoS2 Flakes
20%
Engineering
Engineering
100%
Atomic Layer Deposition
100%
Surface Defect
100%
Molybdenum Disulfide
83%
Dielectrics
33%
Surface Coverage
33%
Chemical Vapor Deposition
16%
Vapor Deposition
16%
Beam Irradiation
16%
2D Material
16%
Discrete Fourier Transform
16%
Material Science
Surface Defect
100%
Surface (Surface Science)
100%
Film
33%
Titanium Dioxide
22%
Sulfur Vacancies
22%
Dielectric Material
22%
Density
11%
Nucleation
11%
Electronic Property
11%
Chemical Vapor Deposition
11%
Two-Dimensional Material
11%
Surface Treatment
11%