Surface acoustic wave resonators using lithium niobate on silicon carbide platform

Shibin Zhang, Ruochen Lu, Hongyan Zhou, Steffen Link, Yansong Yang, Zhongxu Li, Kai Huang, Xin Ou, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work demonstrates a group of shear horizontal (SHO) mode surface acoustic wave (SAW) resonators using Lithium Niobate (LiNbO3) thin films on Silicon Carbide (SiC) substrates. The fabricated resonator has demonstrated a large effective electro-mechanical coupling (kt2) of 26.6% and a high-quality factor (Bode-Q) of 1092, hence resulting in a high figure of merit (FoM= kt2 ·Bode-Q) of 290 at 1.90 GHz. Additionally, these fabricated resonators show scalable resonances from 1.71 GHz to 3.17 GHz, and impedance ratios between 55.9 dB and 67.5 dB.

Original languageEnglish (US)
Title of host publicationIMS 2020 - 2020 IEEE/MTT-S International Microwave Symposium
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages253-256
Number of pages4
ISBN (Electronic)9781728168159
DOIs
StatePublished - Aug 2020
Event2020 IEEE/MTT-S International Microwave Symposium, IMS 2020 - Virtual, Los Angeles, United States
Duration: Aug 4 2020Aug 6 2020

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
Volume2020-August
ISSN (Print)0149-645X

Conference

Conference2020 IEEE/MTT-S International Microwave Symposium, IMS 2020
Country/TerritoryUnited States
CityVirtual, Los Angeles
Period8/4/208/6/20

Keywords

  • FoM
  • Impedance ratio
  • Lithium niobate
  • MEMS
  • Piezoelectric resonators
  • SHO modes
  • Silicon carbide

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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