@inproceedings{f04156a3c9654a07a6ca3001486bab8d,
title = "Surface acoustic wave resonators using lithium niobate on silicon carbide platform",
abstract = "This work demonstrates a group of shear horizontal (SHO) mode surface acoustic wave (SAW) resonators using Lithium Niobate (LiNbO3) thin films on Silicon Carbide (SiC) substrates. The fabricated resonator has demonstrated a large effective electro-mechanical coupling (kt2) of 26.6% and a high-quality factor (Bode-Q) of 1092, hence resulting in a high figure of merit (FoM= kt2 ·Bode-Q) of 290 at 1.90 GHz. Additionally, these fabricated resonators show scalable resonances from 1.71 GHz to 3.17 GHz, and impedance ratios between 55.9 dB and 67.5 dB.",
keywords = "FoM, Impedance ratio, Lithium niobate, MEMS, Piezoelectric resonators, SHO modes, Silicon carbide",
author = "Shibin Zhang and Ruochen Lu and Hongyan Zhou and Steffen Link and Yansong Yang and Zhongxu Li and Kai Huang and Xin Ou and Songbin Gong",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 IEEE/MTT-S International Microwave Symposium, IMS 2020 ; Conference date: 04-08-2020 Through 06-08-2020",
year = "2020",
month = aug,
doi = "10.1109/IMS30576.2020.9224017",
language = "English (US)",
series = "IEEE MTT-S International Microwave Symposium Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "253--256",
booktitle = "IMS 2020 - 2020 IEEE/MTT-S International Microwave Symposium",
address = "United States",
}