Suppression of spurious modes in lithium niobate A1 resonators using dispersion matching

Yansong Yang, Liuqing Gao, Ruochen Lu, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work presents an improved design that exploits dispersion matching to suppress the lateral spurious modes in the thin-film lithium niobate first-order antisymmetric Lamb wave mode (A1) resonators. The dispersion matching in this work is achieved by micro-machining the lithium niobate thin film to balance the electrical and mechanical loading of electrodes. The fabricated devices based on the proposed method exhibit spurious-free responses with a maximum Q{3dB} of 692 and k{t}{}-{2} of 28%. The demonstrated method herein could overcome a significant hurdle that is currently impeding the commercialization of A1 devices.

Original languageEnglish (US)
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
DOIs
StatePublished - Sep 7 2020
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: Sep 7 2020Sep 11 2020

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2020-September
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
CountryUnited States
CityLas Vegas
Period9/7/209/11/20

Keywords

  • 5G front-ends
  • Acoustic
  • Lithium niobate
  • MEMS
  • New radio
  • Piezoelectric thin film
  • Resonators
  • Spurious modes suppression

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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