@inproceedings{3b24785836574742b31494f52b6116d6,
title = "Suppression of spurious modes in lithium niobate A1 resonators using dispersion matching",
abstract = "This work presents an improved design that exploits dispersion matching to suppress the lateral spurious modes in the thin-film lithium niobate first-order antisymmetric Lamb wave mode (A1) resonators. The dispersion matching in this work is achieved by micro-machining the lithium niobate thin film to balance the electrical and mechanical loading of electrodes. The fabricated devices based on the proposed method exhibit spurious-free responses with a maximum Q{3dB} of 692 and k{t}{}-{2} of 28%. The demonstrated method herein could overcome a significant hurdle that is currently impeding the commercialization of A1 devices.",
keywords = "5G front-ends, Acoustic, Lithium niobate, MEMS, New radio, Piezoelectric thin film, Resonators, Spurious modes suppression",
author = "Yansong Yang and Liuqing Gao and Ruochen Lu and Songbin Gong",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 IEEE International Ultrasonics Symposium, IUS 2020 ; Conference date: 07-09-2020 Through 11-09-2020",
year = "2020",
month = sep,
day = "7",
doi = "10.1109/IUS46767.2020.9251462",
language = "English (US)",
series = "IEEE International Ultrasonics Symposium, IUS",
publisher = "IEEE Computer Society",
booktitle = "IUS 2020 - International Ultrasonics Symposium, Proceedings",
}