@article{f663dc8dd74e47ff8d586606205ef523,
title = "Summary Abstract: Surface chemical reactions in the metal-organic chemical vapor deposition of aluminum films",
author = "Bent, \{B. E.\} and Nuzzo, \{R. G.\} and Dubois, \{L. H.\}",
year = "1988",
month = may,
doi = "10.1116/1.575248",
language = "English (US)",
volume = "6",
pages = "1920--1922",
journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",
issn = "0734-2101",
publisher = "AVS Science and Technology Society",
number = "3",
}