Summary Abstract: Surface chemical reactions in the metal-organic chemical vapor deposition of aluminum films

B. E. Bent; R. G. Nuzzo; L. H. Dubois

doi:10.1116/1.575248

Summary Abstract: Surface chemical reactions in the metal-organic chemical vapor deposition of aluminum films

B. E. Bent, R. G. Nuzzo, L. H. Dubois

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	1920-1922
Number of pages	3
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	6
Issue number	3
DOIs	https://doi.org/10.1116/1.575248
State	Published - May 1988
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1116/1.575248

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title = "Summary Abstract: Surface chemical reactions in the metal-organic chemical vapor deposition of aluminum films",

author = "Bent, {B. E.} and Nuzzo, {R. G.} and Dubois, {L. H.}",

year = "1988",

month = may,

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issn = "0734-2101",

publisher = "AVS Science and Technology Society",

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AU - Dubois, L. H.

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JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

IS - 3

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Summary Abstract: Surface chemical reactions in the metal-organic chemical vapor deposition of aluminum films

ASJC Scopus subject areas

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