Substrate thickness considerations in electron beam lithography

A comprehensive theoretical and experimental study of the spatial distribution of electron energy dissipation in a very thin polymer film for dot, line, and parallel line exposures over a wide range of substrate thickness and exposure dosage is reported. The two Monte Carlo models used in the theoretical calculations are reviewed and the theoretical results obtained are discussed. Experimental fabrication of thin substrates and effective techniques of electron beam lithography on such substrates are described. The concept of equienergy dissipation contours is discussed and then used to compare experimental data with theory. Good agreement between experiment and theory has been obtained. With substrate thickness as a variable, the fundamental influence of electron scattering on the resolution of electron beam lithography has been verified.