Sub-10 nanometre fabrication: Molecular templating, electron-beam sculpting and crystallization of metallic nanowires

Homogeneous metallic nanowires with diameters below 10 nm are produced by sputter coating suspended DNA molecules and/or carbon nanotubes. A fabrication method is described that allows 'e-beam nanosculpting', i.e. local modification of the shape of nanowires, with a resolution of ∼3 nm. The process is performed with a focused electron beam (e-beam) in a transmission electron microscope, under direct visual control. We also demonstrate that e-beam radiation can induce local crystallization of nanowires. This method could be used to fabricate novel electronic devices, e.g. single-electron tunnelling transistors, with dimensions below 10 nm, possibly operating at room temperature.