SU-8 etching technique using molten salt

Shailesh Joshi (Inventor), Gaurav S Singhal (Inventor), Paul Vannest Braun (Inventor), Danny John Lohan (Inventor), Kai-Wei Lan (Inventor)

Research output: Patent

Abstract

A method of decomposing a cured aromatic epoxy resin uses a molten salt bath at less than about 350° C. The molten salt bath includes a plurality of alkali metal hydroxides. The cured aromatic epoxy resin can be in intimate physical contact with a metal or alloy. The cured aromatic epoxy resin can be patterned by a lithographic method. The lithographic method can be multibeam interference lithography to form a three-dimensional photonic crystal template on a conductive substrate for electrodeposition of metal. Contacting the three-dimensional photonic crystal template with the electrodeposited metal with the molten salt bath can form a metal matrix device displaying a periodic pattern that is the inverse of the periodic pattern of the decomposed three-dimensional photonic crystal template.
Original languageEnglish (US)
U.S. patent number11920252
Filing date8/5/21
StatePublished - Mar 5 2024

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