Study of thermal nonlinearity in lithium niobate-based MEMS resonators

Ruochen Lu, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports an iteration-driven method to numerically study the thermal nonlinearity in lithium niobate (LN) based MEMS resonators. In comparison to the state of the art, this technique adopts an approximation-free algorithm and thus more accurately captures the complex nonlinear dynamics that often evades the description by Duffing equation. For the first time, the nonlinearity of LN-based laterally vibrating resonators is theoretically investigated and experimentally validated. The admittance response of both S0 and SH0 mode devices was simulated and measured in this work by forward and backward sweeping the excitation frequency at different power levels. Excellent agreement between simulations and measurements has been achieved.

Original languageEnglish (US)
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1993-1996
Number of pages4
ISBN (Electronic)9781479989553
DOIs
StatePublished - Aug 5 2015
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: Jun 21 2015Jun 25 2015

Publication series

Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Other

Other18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
CountryUnited States
CityAnchorage
Period6/21/156/25/15

Keywords

  • MEMS
  • RF front end
  • Thermal nonlinearity
  • laterally vibrating resonators (LVRs)
  • lithium niobate (LN)
  • numerical study

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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