Study of the dynamic evolution and spectral properties of multi-component plasmas for EUV production

Keyphrases

• Average Energy 33%
• Computational Science 33%
• Dynamic Evolution 100%
• Dynamic Spectrum 33%
• Electromagnetic Spectrum 33%
• Electrostatic Potential 33%
• Energy Spectrum 33%
• Evolution Properties 100%
• Expanding Plasma 66%
• Extreme Ultraviolet 100%
• Extreme Ultraviolet Emission 33%
• Extreme Ultraviolet Lithography 66%
• Gas Discharge 33%
• Gas Species 33%
• Heavy Ions 33%
• Interaction Group 33%
• Ion Energy 33%
• Ion Signal 33%
• Laser-material Interaction 33%
• Light Gas 33%
• Light Source 33%
• Mixed Fuel 33%
• Modeling Results 66%
• Nanoscale Lithography 33%
• One-component Plasma 100%
• Optics 33%
• Plasma Dynamics 33%
• Plasma-material Interactions 33%
• Self-generated 66%
• Soft X-ray 33%
• Spectral Analysis 33%
• Spectral Properties 100%
• Ultraviolet Region 33%
• Xe Ion 66%
• Xenon Light 33%
• Z-pinch 33%

Physics

• Electromagnetic Spectra 50%
• Electrostatics 50%
• Energy Spectra 50%
• Extreme Ultraviolet Radiation 50%
• Gas Discharges 50%
• Heavy Ion 50%
• Laser Material 50%
• Light Source 50%
• Lithography 100%
• Nanoscale 50%
• Optics 50%
• Plasma Dynamics 50%
• Plasma-Materials Interaction 50%
• Spectrum Analysis 50%
• Ultraviolet Emission 50%

Engineering

• Electrostatic Potential 50%
• Energy Engineering 100%
• Energy Spectra 50%
• Extreme-Ultraviolet Lithography 100%
• Gas Specie 50%
• Ion Energy 50%
• Laser Material Interaction 50%
• Light Source 50%
• Lithography 50%
• Nanoscale 50%
• Plasma-Materials Interaction 50%