Study of electrical and chemical profiles of Si implanted in semi-insulating GaAs substrate annealed under SiO2 and capless

M. Feng, S. P. Kwok, V. Eu, B. W. Henderson

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Study of electrical and chemical profiles of Si implanted in semi-insulating GaAs substrate annealed under SiO2 and capless'. Together they form a unique fingerprint.

Physics & Astronomy