Structural and thermal effects of ion-irradiation induced defect configurations in silicon

Engineering & Materials Science

• Ion bombardment 100%
• Thermal effects 63%
• Ions 57%
• Silicon 49%
• Defects 42%
• Thermal conductivity 32%
• Crystal defects 28%
• Irradiation 27%
• Ion beams 12%
• Design of experiments 8%
• Materials properties 7%
• Tuning 6%

Physics & Astronomy

• ion irradiation 65%
• temperature effects 56%
• defects 34%
• silicon 33%
• configurations 33%
• thermal conductivity 21%
• ion impact 17%
• ions 16%
• irradiation 13%
• radial distribution 7%
• bombardment 6%
• energy 6%
• lattice parameters 6%
• fluence 5%
• manufacturing 5%
• ion beams 5%
• tuning 5%
• molecular dynamics 5%

Chemical Compounds

• Ion 24%
• Crystal Defect 20%
• Atomic Number 11%
• Molecular Dynamics 6%
• Amorphous Material 6%