Structural and magnetic properties of Mn-doped anatase TiO₂ films synthesized by atomic layer deposition

Keyphrases

• Atomic Layer Deposition 100%
• Structural Properties 100%
• Magnetic Properties 100%
• Mn-doped 100%
• Doped Anatase 100%
• Anatase TiO2 Film 100%
• Rutile 40%
• Field Dependence 20%
• Magnetization 20%
• Microstructure 20%
• Scanning Electron Microscopy 20%
• X Ray Diffraction 20%
• Si(111) 20%
• Crystallinity 20%
• Magnetic Field 20%
• X-ray Photoelectron Spectroscopy 20%
• Spectroscopic Measurement 20%
• Dopant Sources 20%
• Room Temperature Ferromagnetism 20%
• X-ray Reflectivity 20%
• Diffraction Ray 20%
• Film Composition 20%
• Density Field 20%
• Chemical State 20%
• Thickness Control 20%
• Anatase TiO2 20%
• Process Throughput 20%
• Composition Control 20%
• Microstructure Field 20%

Material Science

• Film 100%
• Magnetic Property 100%
• Titanium Dioxide 100%
• Density 66%
• Thin Films 33%
• Scanning Electron Microscopy 33%
• X-Ray Diffraction 33%
• Doping (Additives) 33%
• Reflectivity 33%
• Titanium Oxide 33%
• Ferromagnetism 33%
• Photoemission Spectroscopy 33%
• Chemical State 33%

Engineering

• Atomic Layer Deposition 100%
• Magnetic Field 20%
• Thin Films 20%
• Ray Diffraction 20%
• Room Temperature 20%
• Dopants 20%
• Photoelectron 20%
• Crystallinity 20%
• Reflectance 20%