Structural and magnetic properties of Mn-doped anatase TiO2 films synthesized by atomic layer deposition

Meredith C.K. Sellers, Edmund G. Seebauer

Research output: Contribution to journalArticlepeer-review

Abstract

Mn-doped anatase TiO2 (Mn: 1.2, 2.4 at%) thin films were grown on Si(100) via atomic layer deposition (ALD). The synthesis utilized Ti(OCH(CH3)2)4 and H2O as ALD precursors and Mn(DPM)3 as a dopant source. Xray photoelectron spectroscopy measurements indicate that Mn is successfully doped in the TiO 2 matrix and reveal information about film composition and elemental chemical states. Microstructure, crystallinity, and density were investigated with scanning electron microscopy, X-ray diffraction, and X-ray reflectivity. All ALD-synthesized films exhibited room-temperature ferromagnetism; the microstructure, density, and magnetic field-dependent magnetization of the TiO2 varied with the concentration of Mn. ALD permits precise composition and thickness control, and much higher process throughput compared to alternative techniques.

Original languageEnglish (US)
Pages (from-to)583-586
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Volume104
Issue number2
DOIs
StatePublished - Aug 1 2011

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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