Abstract
We investigate the uniformity of scanning tunneling microscope nanofabrication on as-prepared chemically etched silicon. Our results show that continuous fabrication produces isolated nanoscale dots along the motion of the tip rather than uniform lines. These results are discussed with the aid of a self-limiting strong-field effect.
Original language | English (US) |
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Pages (from-to) | 4721-4723 |
Number of pages | 3 |
Journal | Journal of Applied Physics |
Volume | 73 |
Issue number | 9 |
DOIs | |
State | Published - 1993 |
ASJC Scopus subject areas
- Physics and Astronomy(all)