Stress evolution to steady state in ion bombardment of silicon

Keyphrases

• Stress Evolution 100%
• Ion Bombardment 100%
• Steady State 100%
• Low Temperature 50%
• Argon Atom 50%
• Crystal Defects 50%
• Ion Beam Current 50%
• Argon Implantation 50%
• Atomic Force 50%
• Nanometre 50%

Engineering

• Ion Implantation 100%
• Low-Temperature 50%
• Nanometre 50%
• Beam Energy 50%
• Constant Value 50%