TY - JOUR
T1 - Strategy for reliable strain measurement in InAs/GaAs materials from high-resolution Z-contrast STEM images
AU - Vatanparast, Maryam
AU - Vullum, Per Erik
AU - Nord, Magnus
AU - Zuo, Jian Min
AU - Reenaas, Turid W.
AU - Holmestad, Randi
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2017/10/16
Y1 - 2017/10/16
N2 - Geometric phase analysis (GPA), a fast and simple Fourier space method for strain analysis, can give useful information on accumulated strain and defect propagation in multiple layers of semiconductors, including quantum dot materials. In this work, GPA has been applied to high resolution Z-contrast scanning transmission electron microscopy (STEM) images. Strain maps determined from different g vectors of these images are compared to each other, in order to analyze and assess the GPA technique in terms of accuracy. The SmartAlign tool has been used to improve the STEM image quality getting more reliable results. Strain maps from template matching as a real space approach are compared with strain maps from GPA, and it is discussed that a real space analysis is a better approach than GPA for aberration corrected STEM images.
AB - Geometric phase analysis (GPA), a fast and simple Fourier space method for strain analysis, can give useful information on accumulated strain and defect propagation in multiple layers of semiconductors, including quantum dot materials. In this work, GPA has been applied to high resolution Z-contrast scanning transmission electron microscopy (STEM) images. Strain maps determined from different g vectors of these images are compared to each other, in order to analyze and assess the GPA technique in terms of accuracy. The SmartAlign tool has been used to improve the STEM image quality getting more reliable results. Strain maps from template matching as a real space approach are compared with strain maps from GPA, and it is discussed that a real space analysis is a better approach than GPA for aberration corrected STEM images.
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U2 - 10.1088/1742-6596/902/1/012021
DO - 10.1088/1742-6596/902/1/012021
M3 - Conference article
AN - SCOPUS:85033726617
SN - 1742-6588
VL - 902
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012021
T2 - Electron Microscopy and Analysis Group Conference 2017, EMAG 2017
Y2 - 3 July 2017 through 6 July 2017
ER -